2D-doped silicon detectors for UV/optical/NIR and x-ray astronomy

X-Ray, Optical, and Infrared Detectors for Astronomy X(2022)

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摘要
In this paper we review the physics and performance of back-illuminated CCDs. Models of back-illuminated CCDs are used to derive requirements for stable, strong surface passivation in space-relevant environments. Models and data are used to compare state-of-the-art surface passivation methods with 2D-doped surfaces. MBE growth of 2D-doped silicon on back-illuminated CCDs and CMOS image sensors enables near 100% charge collection efficiency with exceptional stability in space and other harsh environments. Lifetime tests performed on 2D-doped CMOS image sensors using pulsed DUV lasers have demonstrated the unique stability of 2D-doped detectors against high levels of radiation-induced surface damage. The insensitivity of 2D-doped detectors to Si-SiO2 traps has facilitated the development of a variety of coatings and filters with science-enabling capabilities for NASA instruments and missions in the far and near ultraviolet spectral range. We discuss the status and goals of a strategic partnership between JPL and Teledyne e2v for the certification of 2D-doping processes, and report initial results from our collaboration.
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关键词
UV detectors, delta-doped, silicon, charge coupled device, CMOS Imaging Sensor, Surface passivation, backside charging, ion implantation, delta-doped CCDs, 2D-doped CCDs, X-ray, UV, ultraviolet
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