Sputter Ion Source Cathode Pit Reconstruction by Stylus Profilometer, Optical Techniques and X-ray Micro Computed Tomography
Nuclear instruments and methods in physics research Section A, Accelerators, spectrometers, detectors and associated equipment/Nuclear instruments & methods in physics research Section A, Accelerators, spectrometers, detectors and associated equipment（2022）
关键词
Caesium sputter ion source,Cathode sputter pit,X-ray micro-computer tomography,Confocal microscopy,Stylus profilometer
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