Effect of Negative Bias of HiPIMS and AIP Hybrid Depositon on Microstructure, Mechanical and Anti-Corrosive Properties of Cr2N/TiN Multilayer Coatings

Multi-layered nitride coatings have been widely applied to improve the mechanical and anti-corrosive of metals and/or alloys. Cr2N/TiN multilayer coatings were prepared by the combination of high-power pulsed magnetron sputtering (HiPIMS) and arc ion plating (AIP). The Cr2N layer was co-deposited by HiPIMS and AIP, while the TiN layer was deposited by a single HiPIMS. With increasing the negative bias voltage (V-s) on substrate up to -100 V, the number and size of the droplets decreased; the average grain size of the coatings decreased from 9.4 to 7.5 nm and the hardness increased from 21.5 to 25.1 GPa, and the level of the adhesion of the coatings has reached HF1. The coatings obtained at V-s = -100 V present the best corrosion resistance in NaCl aqueous solution based on the anodic polarization curves and EIS spectroscopy.