Towards automated gas leak detection through cluster analysis of mass spectrometer data

•The data from the mass spectrometer was clustered by Euclidean distance to evaluate the presence or absence of vacuum leaks.•The leaked data and the no-leak data were classified into different clusters in the dendrogram, and this clustering was effective.•In this clustering, it is necessary to use data that is not affected by plasma discharge or fluctuation due to vacuum pumping over a long period.