Valence-shell electronic excitations of CF4 studied by fast electron scattering

Oscillator strengths and cross sections of the valence-shell excitations in CF4 are of crucial importance in modeling the etching plasma and monitoring the greenhouse effect. In this work, generalized oscillator strengths of the valence-shell excitations in CF4 were measured by using an angle-resolved electron energy loss spectrometer, operating at an incident electron energy of 1.5 keV and a high energy resolution of 80 meV. The experimental GOSs are analytically fitted with the well-known Lassettre formula, and, thus, the optical oscillator strengths are determined at the limit of squared momentum transfer K2=0. The analytical GOS also enables an integration over K2, determining the Born cross sections with respect to the incident electron energy from the excitation threshold to 5000 eV. The BE-scaled integral cross sections for dipole-allowed transitions are obtained by adopting the BE-scaling method. Oscillator strengths and cross sections of the valence-shell excitations in CF4 provide an independent cross-check to the previous experimental and theoretical works. Moreover, the cross-checked data supplement and benchmark the molecular database for use in plasma models.