Ensemble RBS: Probing the compositional profile of 3D microscale structures

Niels Claessens,Pierre Couture,Jonathan England,Rita Vos,Thomas Hantschel,Wilfried Vandervorst,André Vantomme,Johan Meersschaut

Surfaces and Interfaces（2022）

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摘要

•Analysis of 3D micron scale devices is demonstrated using ensemble RBS.•High sensitivity is achieved by probing many 3D devices simultaneously.•Ensemble RBS is applied to the study of microfluidic devices.•Enhanced capabilities of ensemble RBS relative to microbeam RBS are demonstrated.

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关键词

Ion beam analysis,Ensemble RBS,Microbeam RBS,Quantification,Lateral resolution,Microfluidics

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