(3N+1)-frame phase retrieval for double-grating Ronchi lateral shearing interferometry

Yunjun Lu,Feng Tang,Rong Su,Zhongliang Li,Fudong Guo,Peng Feng,Xiangzhao Wang

Optics and Lasers in Engineering（2022）

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摘要

•A new shear-phase retrieval algorithm for double-grating Ronchi lateral shearing interferometry is proposed.•The algorithm allows for adjustable shear ratios without any hardware change.•The algorithm can reject unwanted diffraction orders, verified by the spectral analysis using its frequency transfer function.•Significant improvement on the accuracy of wavefront measurement is demonstrated in both experiment and numerical simulation.

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关键词

Ronchi lateral shearing interferometry,Wavefront metrology,Phase retrieval,Phase-shifting algorithm,Frequency transfer function

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