Metaphotonic Color-Routing Nanostructures for Sub-micron Scale CMOS Image Sensors

Sangyun Lee,Sookyoung Roh,Hongkyu Park, Minwoo Lim,Sungmo Ahn,Hyuck Choo,Seokho Yun

Conference on Lasers and Electro-Optics（2022）

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摘要

We design color-routing nanostructures that can spectrally guide light into a Bayer array. To demonstrate, we fabricated 1.0-0.5 um pixel Bayer arrays composed of TiO2 nanoposts and imaged the color-routing focal plane under white light illumination.

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关键词

metaphotonic color-routing nanostructures,Bayer array,nanoposts,color-routing focal plane,white light illumination,submicron scale CMOS image sensors,size 1.0 mum to 0.5 mum,TiO2

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