Direct Laser Lithography: Single-Tool Patterning for Nonlinear Integrated Quantum Optics

Maximilian Protte,Varun B. Verma,Julian Brockmeier,Jan Philipp Höpker,Felix vom Bruch,Sebastian Lengeling,Raimund Ricken,Christof Eigner,Christine Silberhorn,Richard P. Mirin,Sae Woo Nam,Tim J. Bartley

Conference on Lasers and Electro-Optics（2022）

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摘要

We present direct laser lithographic patterning of low-loss waveguides, periodic poling structures for single photon generation, electro-optical modulators and superconducting detectors based on WSi, for integrated quantum circuits in titanium in-diffused lithium niobate.

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关键词

direct laser lithographic patterning,low-loss waveguides,periodic poling structures,single photon generation,electro-optical modulators,superconducting detectors,integrated quantum circuits,single-tool patterning,nonlinear integrated quantum optics,titanium in-diffused lithium niobate,WSi,Ti-LiNbO3

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