Photon-Pair Generation in a Heterogeneous Nanophotonic Chip

Integrated silicon photonics has played an important role in advancing the applications of quantum information and quantum science. However, it is challenging to integrate all components with state-of-the-art performance using only a homogeneous platform. Here, by combining high nonlinearity and low losses in a heterogeneous silicon platform, we efficiently generate high-quality photon pairs through spontaneous four-wave mixing in a hydrogenated amorphous silicon waveguide and route them off-chip through a low-loss silicon nitride waveguide. A record high coincidence-to-accidental ratio value of 1632.6 (+/- 260.4) is achieved in this heterogeneous design with a photon pair generation rate of 1.94 MHz. We also showcase a wide range of multichannel photon sources with a coincidence-to-accidental ratio consistently around 200. Lastly, we measure heralded singlephotons with the lowest g(H)((2)()0) of 0.1085 +/- 0.0014. Our results demonstrate the heterogeneous silicon platform as an ideal platform for the efficient generation of photon pairs and off-chip routing with low losses. It also paves the way for a future hybrid photonic integrated circuit by collecting distinct features from different materials.