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Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor

Rui Gao,Wenjun Zhang,Junmin Jing,Zhiwei Liao,Zhou Zhao,Bin Yao,Huiyu Zhang,Yuzhen Guo,Yanbo Xu,Yonghua Wang,Zengxing Zhang,Zhidong Zhang,Chenyang Xue

Micromachines（2022）

Cited 7|Views11
Key words
piezoresistive pressure sensor,silicon-on-insulator (SOI) structure,dynamic environment test
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