Oxidation related particles on GaSb (1 0 0) substrate surfaces

Guiying Shen,Youwen Zhao,Jingming Liu,Jun Yang,Hui Xie,Jianjun He,Guowei Wang

Journal of Crystal Growth（2022）

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摘要

•Head wafer are oxidized and adsorbed easily.•The main components of the particles are mainly oxides of Ga and Sb.•The existence of Ga-oxides can be indicators for the particle adhesion.

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关键词

A1. Adsorption,A1. Characterization,A1. Substrates,A2. Liquid encapsulated Czochralski method,B1. Zinc compounds,B2. Semiconducting III-V materials

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