Functional Performance of Silicon with Periodic Surface Structures Induced by Femtosecond Pulsed LaserYong Chen,Weiping Peng,Xiaofeng Hu,Chen ZhangCoatings(2022)引用 5|浏览9关键词LIPSS,silicon,surface properties,laser power,scanning intervalAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要