Numerical model of species transport and melt stoichiometry in β-Ga2O3 crystal growth

Andrei Vorob'ev,Alex Galyukov,Andrey Smirnov,Daria Zimina,Vladimir Kalaev

Journal of Crystal Growth（2022）

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摘要

•Numerical model of Ga₂O3 melt dissociation and ion evaporation is proposed.•Model includes chemical interactions in melt and gas.•Model can evaluate effect of furnace design and process on melt stoichiometry.•Effect of process modifications on melt stoichiometry for 2-inch Ga₂O3 Cz growth is demonstrated.

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关键词

A1. Computer simulation,CGSim,Melt stoichiometry,Dynamic atmosphere,CO2,A2. Czochralski method

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