The higher-k phase formation in amorphous HfO2 films by swift heavy ion irradiation

Zongzhen Li,Jie Liu,Pengfei Zhai,Li Liu,Lijun Xu,Shengxia Zhang,Peipei Hu,Jian Zeng

Journal of Crystal Growth（2022）

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摘要

•The higher-k phase of HfO2 films was formed by swift heavy ion irradiation.•The threshold for inducing the monoclinic-to-cubic/tetragonal phase transition in HfO2 is less than 13.0 keV/nm.•The swift heavy ion irradiation can modify the interface structure of HfO2/Si.

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关键词

B1. HfO2,A1. Heavy ion irradiation,A1. Crystallization,A1. Higher-k phase

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