Angle Sensitive Optical Sensor for Light Source Tracker Miniaturization

IEEE Sensors Letters(2022)

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摘要
An angle sensitive optical sensor without conventional optics is presented in this article. The reported device omits the need for adding 3-D optics in postprocessing by monolithic integration of complimentary metal-oxide semiconductor compatible diffraction grating layers, which cuts down the fabrication costs and allows for miniaturization of these types of sensors. The sensor resolves angular information from a monochromatic light source over a single axis with a mean absolute accuracy of 0.6° in an investigated $\pm 26$ ° field-of-view using four unique pixels. This letter facilitates miniaturization of light source trackers, such as sun position sensors on small satellites of the future.
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关键词
Optical sensors,angle sensitive pixels (ASPs),diffraction gratings,optical sensor,opto-electronic system,sun position sensor
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