Structural regulation and polishing performance of dendritic mesoporous silica (D-mSiO2) supported with samarium-doped cerium oxide composites

•Meso-SiO2 supported CeO2 by a continuous Sm-doping from 0 to 100% were synthesized.•The effects of Sm-doping amount on the structure and oxide-CMP behavior were explored.•The 40% Sm-doped composite abrasives improved both surface quality and removal rate.•Low-modulus meso-SiO2 cores in composites contributed to surface scratch eliminations.•Enrichened Ce3+ and VO by Sm-doping were responsible for the optimal CMP performance.