A Light-Emitting Diode Based on AlInGaN Heterostructures Grown on SiC/Si Substrates and Its Fabrication Technology

A technique and technology for manufacturing both LED chips and packaged LEDs from AlInGaN/GaN heterostructures grown on novel SiC/Si substrates synthesized by the method of matched substitution of atoms is described. We have studied the current-voltage characteristics, electroluminescence spectra, and dependence of output power and external quantum efficiency on the current. It is shown that the presence of pores in the SiC/Si substrate, which are naturally formed during its growth, leads to a significant increase in the quantum efficiency of LEDs compared with the quantum efficiency of LEDs fabricated on silicon without a SiC sublayer.