Microwave N2 plasma nitridation of H-diamond (111) surface studied by ex situ XPS, HREELS, UPS, TPD, LEED and DFT

Mohan Kumar Kuntumalla,Yusen Zheng,Mohammed Attrash,Gilad Gani,Shaul Michaelson,Kai Huang,Alon Hoffman

Applied Surface Science（2022）

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摘要

•Diamond (111) exposure to MW(N2) plasma induces no surface damage.•Observed a partial nitrogen coverage (∼1/4 monolayer) after MW(N2) exposure.•HREELS and DFT modeling confirm formation of NH(ad) species on H-diamond (111).

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关键词

Diamond (111) surface,Nitrogen termination,Microwave plasma,Photoelectron spectroscopy,Low energy electron diffraction,High resolution electron energy loss spectroscopy,Density functional theory

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