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Surface Modification of Low-Background Polymers by Applying Nitrogen Ion Implantation for Electronic Substrates of Rare Event Detection

Shaojun Zhang,Yuanyuan Liu,Shasha Lv,Jianping Cheng,Bin Liao,Pan Pang,Lin Chen,Zhi Deng,Yang Tian,Li He

Radiation Physics and Chemistry（2022）

引用 5|浏览21
关键词
Ion implantation,Direct metallization,Surface modification,Rare event detection
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