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55‐2: Roll‐to‐Plate Nanoimprint Lithography As Etching Mask Creating Large‐Area Structured Surfaces

Jan Matthijs ter Meulen,L.W. (Pim) Veldhuizen,Danielle A.C. van der Heijden,Erhan Ercan, Bram J.F. Titulaer

SID Symposium Digest of Technical Papers（2022）

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