High-efficiency microdrilling of glass by parallel transient and selective laser processing with spatial light modulator

Optics & Laser Technology(2022)

引用 10|浏览8
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摘要
•The parallel transient and selective laser processing using the spatial light modulators is developed.•The methods to combine the two lasers with a different wavelength controlled with each spatial modulator is reported.•Two 100-µm depth 10-µm diameter holes are drilled in 50 µs with the parallel transient and selective laser processing.•The processing condition in the parallel transient and selective laser processing is studied.
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关键词
Laser material processing,Microdrilling,Dielectric material,Spatial light modulator
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