Direct single-pass writing of two-phase binary diffraction gratings in a Ge2Sb2Te5 thin film by femtosecond laser pulses

Mikhail P. Smayev,Petr I. Lazarenko, Ivan A. Budagovsky,Alexey O. Yakubov,Vladimir N. Borisov,Yuri V. Vorobyov,Tatyana S. Kunkel,Sergey A. Kozyukhin

Optics & Laser Technology（2022）

引用 8|浏览5

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摘要

•Femtosecond illumination produces non-ablative LIPSS on the surface of GST225 film.•High-quality elongated structures are recorded by a single scan of the laser beam.•The recorded two-phase structure is a reflective diffraction grating.

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关键词

Phase-change materials,Ge2Sb2Te5,Ultrashort laser pulses,Direct laser writing,Laser-induced periodic surface structures,Diffraction grating

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