Plasma-Enhanced Atomic-Layer Deposition of Nanolaminated (InOx)n(GaZnOy)m and the Associated Thin-Film Transistor Properties

Hyun-Jun Jeong,Won-Bum Lee,Jiazhen Sheng,Jun Hyung Lim,Jin-Seong Park

Journal of Materials Chemistry C（2022）

引用 4|浏览2

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摘要

In this study, we describe the deposition of nanolaminated InOx and GaZnOy layers by a supercycle method in plasma-enhanced atomic-layer deposition (PEALD) to control the electrical and physical properties of...

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