Atomic layer deposition and characterization of Zn-doped Ga2O3 filmsZsófia Baji,Ildikó Cora,Zsolt Endre Horváth,Emil Agócs,Zoltán SzabóJournal of Vacuum Science & Technology A(2021)引用 7|浏览3暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要