Effects of Electrical Stress in Solution-Processed Spin-On Glass Dielectric Films: Frequency Dependence
The 1st International Conference on Micromachines and Applications(2021)
摘要
In this work, the effects of the frequency dependence of transparent dielectric based on Spin-on Glass (SOG) under electrical stress is presented. The SOG thin films were cured at 200 °C in ambient air. The capacitance-voltage and capacitance-frequency characteristics were measured in Metal-Oxide-Semiconductor (MOS) capacitors using the SOG thin film. In addition, electrical stress is applied to the MOS capacitors at different voltage values and during a long period of time. The results show, depending on the bias stress applied, a reversible interface charge contribution and an irreversible charge induced by interface states probably generated by the degradation of the film.
更多查看译文
关键词
glass dielectric films,electrical stress,solution-processed
AI 理解论文
溯源树
样例
![](https://originalfileserver.aminer.cn/sys/aminer/pubs/mrt_preview.jpeg)
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要