Thermal atomic layer etching of amorphous and crystalline Al2O3 filmsJessica A. Murdzek,Adarsh Rajashekhar,Raghuveer S. Makala,Steven M. GeorgeJournal of Vacuum Science & Technology A(2021)引用 15|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要