(Invited) Deposition of Crystalline AlN on Si and SiC Using Atomic Layer Annealing and Pulsed ALD/CVDAndrew C Kummel,Scott Ueda,Aaron McLeod,Daniel Alvarez,Jeff Spiegelman,Jacob Woodruff,Mansour Moinpour,Ravindra KanjoliaECS Meeting Abstracts(2021)引用 0|浏览5暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要