3D laser nanolithography of crystals

Airan Rodenas,Giacomo Corrielli,Petra Paie,Roberto Osellame

2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE & EUROPEAN QUANTUM ELECTRONICS CONFERENCE (CLEO/EUROPE-EQEC)（2021）

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摘要

We will present details on how optical crystals such as yttrium aluminum garnet (YAG) and sapphire can be nanostructured on the three dimensions within their volume, with feature sizes down to the 100 nm level and device footprints on the cm scale, with the aim of fabricating photonic crystal type embedded waveguides, sub-wavelength diffraction gratings, and other nanoscale light control devices [1] .

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关键词

3D laser nanolithography,optical crystals,yttrium aluminum garnet,sapphire,device footprints,photonic crystal type embedded waveguides,sub-wavelength diffraction gratings,nanoscale light control devices,YAG,Al2O3

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