Enhanced ferroelectric polarization with less wake-up effect and improved endurance of Hf0.5Zr0.5O2 thin films by implementing W electrode

1.Ferroelectric polarization value and o-/t- mixed phase fraction of HZO thin films can be largely enhanced by implementing W capping electrode.2.Less wake-up effect (10.1%) and superior fatigue properties up to 1.5 × 1010 cycles were obtained for W/HZO/W capacitor.3.The influence of the top electrode on the ferroelectricity of metal/HZO/metal capacitor is more important than that of the bottom electrode.