The effect of ultrasonic wave amplitude on the physical properties of zinc oxide (ZnO) deposited by ultrasonic spray method

•ZnO thin films were deposited on glass substrates by ultrasonic spray with different ultrasonic wave amplitude (20 to 60 %).•The X-ray diffraction analysis of ZnO films indicates that the deposited films are polycrystalline related to hexagonal structure.•The films had a strong preferred orientation, it is (002) plane.•Over 80% average transmittance in the visible region of 400–800 nm was achieved, and the band gap changes from 3.24 to 3.27 eV with the increasing of the ultrasonic wave amplitude.•Good electrical properties of ZnO films were achieved.