Investigation on the relationship between dislocation type and the annihilation mechanism of GaN-on-Si

Jinbang Ma,Yachao Zhang,Yifan Li,Yixin Yao,Tao Zhang,Qian Feng,Zhen Bi,Lansheng Feng,Jincheng Zhang,Yue Hao

Materials Letters（2022）

引用 0|浏览7

暂无评分

摘要

•Relationship between dislocation annihilation and dislocation type is revealed.•The cause of almost no annihilation of edge dislocations is explained.•Reason for the failure of AlGaN and AlN layers to block dislocations is given.

查看译文

关键词

Dislocation type,Annihilation mechanism,Crystal growth,Chemical vapour deposition

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要