A novel method for the assessment of surface charge density variance in capacitive RF-MEMS switches

The present paper provides a novel, inexpensive and non-destructive method to assess the surface charge density variance in capacitive RF-MEMS switches. The charge variance evolution can be monitored during charging and discharging processes by measuring the up-state capacitance, in addition to the mean value, providing results directly related to charging failure mechanisms and the prediction of the devices lifetime for unipolar/bipolar actuation. Also, the experimental results can be used to engineer the dielectric film electrical properties in order to control the surface and bulk conductivities according to needed application.