RF sheath induced sputtering on Proto-MPEX part 2: Impurity transport modeling and experimental comparison

PHYSICS OF PLASMAS(2021)

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摘要
The Prototype Material Plasma Exposure eXperiment (Proto-MPEX) is a pulsed linear plasma device that uses a radio frequency (RF) helicon antenna and a helicon ceramic window as the plasma ionization source. Modeling performed within this work on the helicon operations predicts hot spots on the helicon ceramic window due to an RF-induced sheath. The RF sheath potential leads to physical sputtering of the ceramic window predominantly where the helicon antenna sits around the helicon window. The role of oxygen in sputtering within Proto-MPEX is also investigated and is needed to match the experimental data. Experiments on Proto-MPEX show reasonable agreement with the modeled erosion/redeposition pattern on the helicon window, and the modeled impurity flux to the target shows radial transport within the device as expected from classical collisional impurity transport. Temperature screening of impurities is shown to be needed for Proto-MPEX to reduce impurity flux to the target. The modeling approach used in this work can be applied to other plasma RF applications for the determination of impurity production and transport.
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