High-Compactness Bessel Beam Emitters Based on Vertical-Cavity Surface-Emitting Lasers

Guanzhong Pan,Meng Xun,Xue Chen,Zhuangzhuang Zhao,Yun Sun,Jingtao Zhou,Dexin Wu

IEEE Transactions on Electron Devices（2022）

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摘要

The existing Bessel beam generators generally require bulk optics counterparts and additional spatial laser sources, which adds complexity and bulkiness to the system. In this work, we propose Bessel beam devices with high compactness based on vertical-cavity surface-emitting lasers (VCSELs) and microdielectric axicons made by Si3N4. The transparent microaxicons are fabricate...

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关键词

Vertical cavity surface emitting lasers,Laser beams,Apertures,Measurement by laser beam,Optical device fabrication,Silicon,Etching

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