Thermoelastic modeling of laser-induced generation of strong surface acoustic waves

JOURNAL OF APPLIED PHYSICS(2021)

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摘要
Short pulse laser irradiation of a substrate can generate pulses of surface acoustic waves (SAWs) capable of propagating long distances along the surface of the irradiated substrate. In this work, we use thermoelastic modeling of the generation of SAWs on a Si substrate to explore the effect of irradiation parameters, i.e., pulse duration, laser spot size, absorption depth, and spatial profile of the laser energy deposition, on the strength of the SAWs. A particular goal of this study is to establish the optimum conditions for maximizing the strength of the surface waves generated in the nonablative, thermoelastic irradiation regime. The simulations demonstrate that the highest strain amplitude of the laser-generated SAWs can be achieved for a laser spot size comparable to the characteristic length of the SAW propagation during the laser pulse. The amplitude of SAWs increases with the increase in the characteristic laser energy deposition depth, and laser pulses with sharper spatial energy deposition profiles (flat-top laser beams) produce stronger SAWs. For the optimal set of irradiation parameters, the strain amplitude of a SAW generated in Si in the thermoelastic regime can reach the levels of 10(-4)-10(-3), which are sufficiently high for causing nonlinear sharpening of the wave profile and the formation of a shock front during the wave propagation from the laser spot. The computational predictions suggest the feasibility of a continuous generation of strong nonlinear pulses of SAWs, which may be utilized for driving the surface processes in thin film deposition, growth of two-dimensional materials, heterogeneous catalysis, and other applications.
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