Breakdown and Healing of Tungsten-Oxide Films on Microelectromechanical Relay Contacts

This work discusses the electrical break down of tungsten oxide films that form on contacting surfaces of tungsten electrodes in micro-electro-mechanical (MEM) relays. Electrical tests were applied to the contacts of 27 devices to measure the voltage, current and charge required to break down the oxide films, and also to measure the change in current through the contacts as the film healed. The ox...