Counting grids for analysis of small biological objects

A new approach for fabrication of grid structures on substrates (devices) for visual characterization of ultra-small biological objects is presented. By Ar+-ion mask implantation of silica substrates is applied to create grid structures with cells of 25 mu m size and a depth of 100 nm. Demonstration of efficiency of such structures was carried out by scanning electron microscopy observation and energy dispersive spectrometry - EDX analysis using substrates with deposited Staphylococcus bacteria.