Thickness shear SMR resonator based on Yttrium-doped AlN for high sensitive liquid sensors

F. Laidoudi,F. Kanouni,A. Assali,C. Caliendo,S. Amara,H. Nezzari,F. Boubenider

Sensors and Actuators A: Physical（2022）

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摘要

•Solidly mounted resonator based on Al1−xYxN is studied by finite element method for different Yttrium- dopant concentrations.•A significant enhancement in frequency characteristics of SMR resonator after incorporation of Y-dopant.•High sensitivity of TS mode to viscosity and gravimetric measurements for different Y-dopant concentrations.•An increased capability of SMR resonator based on Al1−xYxN to measure conductivity of liquids.

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关键词

SMR resonator,Thickness shear (TS) mode,Finite element analysis,Gravimetric and viscosity measurements,Liquids conductivity measurement

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