H2O2 as a strong catalyzer for the growth velocity of SILAR-deposited ZnO thin films

Chemical Physics Letters(2022)

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摘要
•A simple SILAR-based protocol for the synthesis of ZnO thin films is reported.•Films were homogeneous on large areas, polycrystalline and presented well-adhesion.•The influence of H2O2 on the films’ growth velocity was studied.•Thickness could be tuned between 100 and 300 [nm] only by H2O2 effects.•Results show the strong H2O2 catalyzing effect on ZnO films deposition velocity.
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关键词
ZnO Thin Films,SILAR Method,Rutherford Backscattering Spectroscopy
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