KrF excimer laser induced damage and its mechanism of CaF2 single crystal with (111), (110) and (100) planes

CaF2 crystal generally has a fluorite-type crystal structure, in which the cleavage plane is {111} and the slip system is {1 0 0} (1 1 0). The mechanical properties of different crystal planes are obviously different. In this investigation, 248 nm KrF excimer laser damage experiments were carried out on three different crystal planes (100), (110) and (111) of CaF2 crystals. The laser induced damage threshold was obtained, and the relationship between crystal plane and damage characteristics was analyzed. Our work highlights were that by analyzing the relationship among crystal plane, cleavage plane and slip plane, the formation mechanism of surface morphology of (111), (110) and (100) crystal planes were summarized.