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The Effect of Deposition Process Parameters on Thin Film Coatings for the Athena X-ray Optics

S. Massahi,D. D. M. Ferreira,F. E. Christensen,N. Gellert,S. Svendsen,P. L. Henriksen,A. S. Jegers,M. Collon,B. Landgraf,D. Girou,A. Thete,B. Shortt,I Ferreira,M. Bavdaz, W. Schoenberger, A. Langer

Optics for EUV, X-Ray, and Gamma-Ray Astronomy X（2021）

引用 9|浏览12
关键词
X-ray optics,DC magnetron sputtering,Silicon Pore Optics,Athena
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