A new method to measure spectral reflectance and film thickness using a modified chromatic confocal sensor
Optics and Lasers in Engineering(2022)
摘要
•A feasible and convenient method for spectral reflectance measurement based on the chromatic confocal technology.•The film thickness is determined by fitting the measured spectral reflectance with the theoretical spectral reflectance.•The scan speed provides a significant potential to enhance the measurement efficiency.
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关键词
Spectral reflectance,Film thickness,Chromatic confocal sensor,Self-reference method
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