Simple preparation of nanoporous ITO film with novel sparking method

Winai Thongpan,Tewasin Kumpika,Ekkapong Kantarak,Wattikon Sroila,Dimitrios Louloudakis,Stefan Rucman,Wiradej Thongsuwan,Pisith Singjai

Materials Letters（2022）

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摘要

•Nanopore structure of ITO films was simply fabricated by sparking method.•Film thickness 510 nm provides great electrical conductivity and transparency.•The intensity of (222) diffraction peak is obviously strong for annealing at 500 °C.•Resistivity of 4.6 × 10−3 Ω.cm and transmittance of 84% were obtained in this work.

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关键词

porous ITO film,Low resistivity,Transparency,Sparking method

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