Testing of non-evaporable getter pills for standardization of their pumping performance testing method

VACUUM(2022)

引用 6|浏览0
暂无评分
摘要
The pumping characteristics of non-evaporable getter (NEG) pills were measured according to ASTM F 798-97 (2002) for standardizing their pumping performance testing method. St707 (Zr-V-Fe alloy) and ZAO (Zr-V-Ti-Al alloy) were used as samples. The repeatability of three measurements for the NEGs was within 12% for H-2 and 5% for CO, respectively, except for the first measurement. The data scatter of pumping speed per unit nominal area of the St707 which had different years of fabrication and sizes, was within 30% for H-2 and within a factor of 2 for CO, whereas that of the ZAO was 3 times larger at maximum than that of the St707 for both H-2 and CO. Our results were compared with those from previous studies and calculation models.
更多
查看译文
关键词
pumping performance testing method,non-evaporable
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要