Electrical properties of ZnO films implanted with rare earth and their relationship with structural and optical parameters

Tomasz A. Krajewski,Renata Ratajczak,Serhiy Kobyakov,Wojciech Wozniak,Krzysztof Kopalko,Elzbieta Guziewicz

Materials Science and Engineering: B（2022）

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摘要

•High-quality ZnO films were obtained by low temperature Atomic Layer Deposition.•Implantation-induced structural and optical response of ZnO:RE was described.•Role of RTP process in ZnO lattice recovery after RE implantation was explained.•Relation between lattice recovery and ZnO:RE electrical parameters was discussed.

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关键词

Oxides,Thin films,Optical properties,Defects,Electrical properties

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