Calcination: the enabler of next-gen additive inorganic 3D structuring

Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV(2022)

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摘要
Here, we describe progress made in the field of additive manufacturing “unchained” via post processing of composites. Hybrid prepolymers are known for their usefulness in forming complex micro-/nano- devices using various forms of laser lithography. They contain metal-oxide constituents and are special for their sol-gel form, relatively low shrinkage and high laser damage threshold (LIDT) properties during/after exposure. Yet, there is one more new property that can be induced due to their special composition: present metal and oxide elements can form into a purely inorganic glass or ceramic lattices in a heat-treatment process without the loss of the previous geometry. This area of research recently gained rapid traction and is coming into fruition as an enabler of full 3D nanophotonics, micro-optics, medical devices and more. This is due to fact that new materials can be produced with a simple process, resulting in increased refractive index and LIDT, together with inertness.
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