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High-Precision Characterization of Super-Multiperiod AlGaAs/GaAs Superlattices Using X-Ray Reflectometry on a Synchrotron Source

Goray L. I.,Pirogov E. V.,Svechnikov M. V.,Sobolev M. S.,Polyakov N. K.,Gerchikov L. G.,Nikitina E. V.,Dashkov A. S.,Borisov M. M.,Yakunin S. N.,Bouravleuv A. D.

Technical Physics Letters（2021）

Cited 6|Views9
Key words
AlGaAs/GaAs superlattice,molecular-beam epitaxy,X-ray reflectometry,synchrotron source,photoluminescence.
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