Effect of substrate temperature on the structural, static and dynamic magnetic properties of FeSi/MgO(001) films

FeSi films with different substrate temperature (T (s)) were deposited on MgO(001) substrates by radiofrequency magnetron sputtering. During the change of crystal structure from the amorphous to the epitaxial state, the magnetic anisotropy changed in three stages: dominant uniaxial magnetic anisotropy (T (s) < 400 degrees C), enhanced cubic magnetocrystalline anisotropy (400 degrees C <= T (s)<= 600 degrees C) and weak cubic magnetocrystalline anisotropy (T (s) = 700 degrees C and 800 degrees C). In addition, the resonance frequency integral (r) first decreased and then reached its maximum value before finally disappearing due to the large coercivity field. These results demonstrate the correlation between the structure and static and dynamic magnetic properties of FeSi films, and provide an effective method for preparing soft films with deterministic uniaxial or cubic magnetic anisotropy for practical applications.