A Multi-Objective Approach for Rapid Identification of Post-Cu Interconnect Candidates

2022 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA)(2022)

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摘要
Identifying an Interconnect that will replace Cu will require the identification of a material that can meet a variety of materials design requirements and constraints. We propose an approach to simplify these hard to compute design to constraints into simple metrics. With the help of multi-objective optimization techniques, we are able to screen 15,000+ candidate metals rapidly. We present the wo...
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关键词
Toxicology,Sensitivity,Databases,Metals,Very large scale integration,Linear programming,Information filters
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